· Slim Actuator with Hollow Shaft Motor & Ball Screw Spline

· Vacuum(V) + Linear(Z) + Rotary(R), 3-in-1 Actuator

· Repeatability (Z Axis : ±0.01 mm / R Axis : ±0.1˚)

· CiA402 Drive Profile

· CC-Link IE TSN-compatible Closed Loop Stepper System

· Tuning Not Required, No Hunting

· Low Heat Generation, High Torque, High Resolution, Fast Response